Abstract: Transparent and conducting oxide (TCO) glass electrode is the essential part of solar cell system. Fluorine-doped tin oxide (SnO2:F) thin film is one of the TCO layers on glass substrate. Indium-doped tin oxide (SnO2:In) (ITO) has high transparency and high electrical conductivity. But the electrical resistance of ITO increases more than three times of former value when the film temperature is 300oC or higher. So, SnO2:F (FTO) is more attractive than ITO for dye-sensitized solar cell. In this work, spray pyrolysis deposition technique was used to fabricate SnO2:F film on glass substrate. And then film thickness and refractive index of SnO2:F thin film were determined by spectroscopic ellipsometer.